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Microelectronics

APX300 Dry Etcher

The APX300 (option S) Dry Etcher is the perfect dry etching equipment for silicon and compound semiconductors. It incorporates a multi-wafer direct cooling system for optimal control of wafer temperature, as well as MSC-ICP (Multi-Spiral Coil type ICP) and BM-ICP (Beamed-type ICP) plasma sources to generate high density plasma. In this way, it achieves a uniform etching profile in a very short timeframe. Building upon the single wafer process chamber of the previous model (Panasonic E620), combined with enhanced process options and two different handling systems, the APX300 (option S) is extremely fast and covers a wide range of process demands.

Features and benefits of Panasonic's APX300 (option S) Dry Etcher  The Panasonic APX300 (option S) Dry Etcher can process wafers such as power devices, SAW filters, communication devices, MEMS sensors and many more. The APX300 (option S) is the successor to the previous best-selling Panasonic E620 and utilizes the same single wafer process chamber.  Two plasma sources are available: MSC-ICP (Multi-Spiral Coil type ICP) and BM-ICP (Beamed-type ICP). MSC-ICP is Panasonic's latest technology, developed to realize highly accurate processing. BM-ICP offers higher electron density and achieves faster processing, covering a wide range of process demands.  In addition, two types of handling systems are available: Atmospheric Loading Supply and Vacuum Load Lock Supply.  The Panasonic APX300 (option S) Dry Etcher is CE certified.

PT-FRZ60/50/55 series

PT-FRZ50

DLP™ imaging technology, Quartet Color Harmonizer, Rich Color Enhancer, and digitally modulated Dynamic Contrast 2 optimization coalesce in images of surpassing brightness, color, and clarity regardless of ambient light levels. Flexible 2.0x zoom lens with V/H Lens-Shift joins DIGITAL LINK and CEC-ready HDMI® terminals supporting 4K/60p input signals2. Separate LAN terminal and USB-DC outlet further streamline installation. Operation is almost inaudible at 27 dB4.Heat-pipe cooling for the laser modules and heat-sinks for airtight DMD block support filterless design for 20,000 hours of maintenance-free projection. Multi-Laser Drive Engine has failover circuit protection while optional Early Warning software reinforces reliability.

PT-FRZ60/50/55 series

PT-FRZ60

DLP™ imaging technology, Quartet Colour Harmonizer, Rich Colour Enhancer, and digitally modulated Dynamic Contrast 2 optimization coalesce in images of surpassing brightness, colour, and clarity regardless of ambient light levels. Flexible 2.0x zoom lens with V/H Lens-Shift joins DIGITAL LINK and CEC-ready HDMI® terminals supporting 4K/60p input signals2. Separate LAN terminal and USB-DC outlet further streamline installation. Operation is almost inaudible at 27 dB4.Heat-pipe cooling for the laser modules and heat-sinks for airtight DMD block support filterless design for 20,000 hours of maintenance-free projection. Multi-Laser Drive Engine has failover circuit protection while optional Early Warning software reinforces reliability.

PT-RZ990/890/790/690 series

PT-RZ890/890L

Deepen immersion in any environment with vivid, accurate colours backed by up to 10,000 lm*1 of brightness thanks to Quartet Colour Harmonizer and 1-Chip DLP™ imaging technology. With support for 4K/60p input signals, separate DIGITAL LINK and LAN terminals, and diverse optional lenses, these projectors reduce installation hassles with convenient flexibility.Engineered for 20,000 hours of maintenance-free reliability with lasting brightness and colour uniformity from the industry’s leading dust-resistant optical engine.

PT-VMZ71 Series

PT-VMZ51S

Deliver clear, striking images in well-lit open meeting spaces and classrooms from the smallest and lightest LCD laser projector in its class. High 7,000 lm brightness, 3,000,000:1 contrast, and vivid color creates an engaging presentation experience.

PT-RZ990/890/790/690 series

PT-RZ790/790L

Deepen immersion in any environment with vivid, accurate colours backed by up to 10,000 lm*1 of brightness thanks to Quartet Colour Harmonizer and 1-Chip DLP™ imaging technology. With support for 4K/60p input signals, separate DIGITAL LINK and LAN terminals, and diverse optional lenses, these projectors reduce installation hassles with convenient flexibility.Engineered for 20,000 hours of maintenance-free reliability with lasting brightness and colour uniformity from the industry’s leading dust-resistant optical engine.

PT-EZ770 Series

PT-EZ770Z/EZ770ZL

High brightness, low TCO and flexible installation LCD Projector Ideal for use in education and corporate environments

PT-RZ990/890/790/690 series

PT-RZ990/RZ990L

Deepen immersion in any environment with vivid, accurate colours backed by up to 10,000 lm*1 of brightness thanks to Quartet Colour Harmonizer and 1-Chip DLP™ imaging technology. With support for 4K/60p input signals, separate DIGITAL LINK and LAN terminals, and diverse optional lenses, these projectors reduce installation hassles with convenient flexibility.Engineered for 20,000 hours of maintenance-free reliability with lasting brightness and colour uniformity from the industry’s leading dust-resistant optical engine.

PT-FRQ60 Series

PT-FRQ50

Compact 1-Chip DLP™ Projectors Deliver Smooth, Detailed Images for an Insightful Visual Experience

PT-REZ15 Series

PT-REZ80

Evolved 8,000lm WUXGA 1-Chip DLP™ Projector Transform Your Experience with a Smooth, Frictionless Workflow

PT-EZ590 Series

PT-EZ590/EZ590L

Compact and powerful LCD projectors Designed to light up lecture theaters and conference rooms

PT-RZ990/890/790/690 series

PT-RZ690/RZ690L

Deepen immersion in any environment with vivid, accurate colours backed by up to 10,000 lm*1 of brightness thanks to Quartet Colour Harmonizer and 1-Chip DLP™ imaging technology. With support for 4K/60p input signals, separate DIGITAL LINK and LAN terminals, and diverse optional lenses, these projectors reduce installation hassles with convenient flexibility.Engineered for 20,000 hours of maintenance-free reliability with lasting brightness and colour uniformity from the industry’s leading dust-resistant optical engine.

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